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Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

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3D model Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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NE = 3328 NDF = 88416 3D FE model Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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F1 F2 First natural mode Second natural mode Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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Ux Displacements Ux Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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Uy Displacements Uy Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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Uz Displacements Uz Finite element modeling and modal analysis of micromechanical gyroscope sensitive element


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Finite element modeling and modal analysis of micromechanical gyroscope sensitive element Influence of deformed state arising at sensitive element manufacturing on a spectrum of natural frequencies


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